学会発表

量子界面物性研究室
教授 神谷格

掲載年度 2020
種類 国内
学会名 JSAP Spring Meeting 2021
発表題目 Control of Density of 3D Stacked Submonolayer (SML) InAs Nanostructures by As2 Flux
発表者 Ronel Christian Intal Roca
Itaru Kamiya
主催団体 JSAP
発表場所 Online Virtual
発表日 2021/03/17
講演内容 Stacked submonolayer (SML) growth of InAs nanostructures by MBE has been gaining interest recently for various optoelectronic applications. In contrast to the well-known Stranski-Krastanov (SK) growth of InAs nanostructures, stacked SML growth involves the cycled deposition of SML-thick InAs and few ML-thick GaAs. We have recently reported evidence of the 2D to 3D transition in SML InAs nanostructures. This transition leads to the existence of two distinct kinds of stacked SML nanostructures: 2D islands and 3D structures. Compared to the analogous transition in SK growth, the properties of the stacked SML transition is not yet well investigated. Hence, this study aims to elucidate the controllability of the density of 3D structures by As2 flux. It will be demonstrated that a wide control of 3D structure density (10^8 ~ 10^10 cm^-2) is possible simply by adjusting the As2 flux in stacked SML growth.