| 主な研究論文 |
・G. Han, Y. Murata, Y. Minami, M. Sohgawa, T. Abe, Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma. Sensor Mater, 217 (2017).
・G. Han, Y. Murata, D. Ohkawa, M. Sohgawa, T. Abe, Deep Reactive Ion Etching Technique Involving Use of 3D Self-Heated Cathode. 2017 19th Int Conf Solid-state Sensors Actuators Microsystems Transducers, 1281–1284 (2017).
・Han, G. & Sasaki, M. Microtextured die using silicon stencil mask for micro-machining of stainless steel. Jpn J Appl Phys 61, SA1012 (2022). |
